Optical micro-paddle beam deflection measurement for electrostatic mechanical testing of nano-scale thin film application to MEMS-Reference-Cited by-同舟云学术

Optical micro-paddle beam deflection measurement for electrostatic mechanical testing of nano-scale thin film application to MEMS

Published:2010-01-01 Issue:7 Volume:16 Page:1131-1137
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Tong Chi-Jia,Cheng Ya-Chi,Lin Ming-Tzer,Chung Kuan-Jung,Hsu Jiong-Shiun,Wu Chung-Lin

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-009-0999-7.pdf

Reference13 articles.

1. Emery RD, Povirk GL (2003) Tensile behavior of free-standing gold films. Acta Mater 51:2067–2087

2. Espinosa HD, Prorok BC (2002) Effects of film thickness on the yielding behavior of polycrystalline gold films. Mater Res Soc Symp Proc 695:349–354

3. Haque MA, Saif MTA (2001) In situ tensile testing of nano-scale specimens in SEM and TEM. Exp Mech 42(1):123–128

4. Hoffman RW (1976) Stresses in thin films: the relevance of grains boundaries and impurities. Thin Solid Films 34:185–190

5. Hommel M, Kraft O (2001) Deformation behavior of thin copper films on deformable substrates. Acta Mater 49(19):3935–3947

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