Sensitivity enhancement and temperature compatibility of graphene piezoresistive MEMS pressure sensor

Author:

Nag Meetu,Singh Jaideep,Kumar Ajay,Alvi P. A.,Singh KulwantORCID

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Bae SH, Lee Y, Sharma BK, Lee HJ, Kim JH, Ahn JH (2013) Graphene-based transparent strain sensor. Carbon N Y 51:236–242

2. Bhatt K, Rani C, Kapoor A, Kumar P, Sandeep S, Kumar S, Singh R, Tripathi CC (2018) A facile approach to fabricate graphene based piezoresistive strain sensor on paper substrate. Indian J Pure Appl Phys 56(5):361–366

3. Chen X, Zheng X, Kim J-K, Li X, Lee D-W (2011) Investigation of graphene piezoresistors for use as strain gauge sensors. J Vac Sci Technol B Nanotechnol Microelectron Mater Process Meas Phenom 29(6):06FE01

4. Lloyd-Hughes J, Jeon TI (2012) A review of the terahertz conductivity of bulk and nano-materials. J Infrared Millim Terahertz Waves 33(9):871–925

5. Malhaire C, Barbier D (2003) Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment. Thin Solid Films 427(1–2):362–366

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