Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers

Author:

Roy Anindya Lal,Bhattacharyya Tarun Kanti

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference28 articles.

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2. Allen HV, Terry SC, de Bruin DW (1989) Accelerometer systems with self-testable features. Sens Actuators, A 20(1–2):153–161

3. Amini BV, Ayazi F (2004) A 2.5 V 14-bit ΣΔ CMOS SOI capacitive accelerometer. IEEE J Solid-State Circuits 39(12):2467–2476

4. Analog Devices (2009) 40 μA micropower instrumentation amplifier with zero crossover distortion; AD8236 specification datasheet. http://www.analog.com/static/imported-files/data_sheets/AD8236.pdf

5. Analog Devices (2010) Single-axis high-g iMEMS® accelerometers; ADXL78 specification datasheet. http://www.analog.com/static/imported-files/data_sheets/ADXL78.pdf

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