Development of three-dimensional wafer level chip scale packaging using via last TSV and UV laser releasable temporary bonding technologies

Author:

Wang Chengqian,Zhang Meng,Ming Xuefei,Ma Shuying,Yu Daquan

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Oriented design of wafer-level stacking structures to enhance reliability of laser debonding of thin devices;Optics & Laser Technology;2024-02

2. Effect of Different Defects in Temporary Bonding on Laser Debonding;2023 24th International Conference on Electronic Packaging Technology (ICEPT);2023-08-08

3. Design and characterization of a novel low temperature wafer level bonding technology;2023 24th International Conference on Electronic Packaging Technology (ICEPT);2023-08-08

4. A Highly Compatible and Step-by-step Temporary Bonding and Debonding Strategy for Ultra-thin Wafer Level Package;2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2023-07-31

5. Achieving low-temperature wafer level bonding with Cu-Sn-In ternary at 150 °C;Scripta Materialia;2023-01

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