An improved analytical and finite element method model of nanoelectromechanical system based micromachined ultrasonic transducers-Reference-Cited by-同舟云学术

An improved analytical and finite element method model of nanoelectromechanical system based micromachined ultrasonic transducers

Published:2016-07-29 Issue:6 Volume:23 Page:2163-2173
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Maity Reshmi,Maity Niladri Pratap,Thapa R. K.,Baishya Srimanta

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-016-3073-2.pdf

Reference19 articles.

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2. Badi M, Yaralioglu G, Ergun A, Degertekin F, Cheng C, Khuri-Yakub BT (2000) A first experimental verification of micromachined capacitive lamb wave transducers. IEEE Ultrason Symp 1:311–314

3. Bozkurt A, Degertekin F, Atalar A, Khuri-Yakub BT (1998) Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers. IEEE Ultrason Symp 2:1025–1028

4. David J, Cheeke N (2012) Fundamentals and applications of ultrasonic waves. CRC Press, USA

5. Haller M, Khuri-Yakub BT (1996) A surface micromachined electrostatic ultrasonic air transducer. IEEE Trans Ultrason Ferroelectr Freq Control 43:1–6

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