High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing-Reference-Cited by-同舟云学术

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High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing

Published:2014-02-06 Issue:10-11 Volume:20 Page:2097-2102
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Do Mai Trang,Li Qinggele,Nguyen Thi Thanh Ngan,Benisty Henri,Ledoux-Rak Isabelle,Lai Ngoc Diep

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-014-2096-9.pdf

Reference17 articles.

1. Campbell M, Sharp DN, Harrison MT, Denning RG, Turberfield AJ (2000) Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature 404:53–56

2. Cumpston BH,Ananthavel SP, Barlow S, Dyer DL, Ehrlich JE, Erskine LL, Heikal AA, Kuebler SM, Lee IYS, McCord-Maughon D, Qin J, Röckel H, Rumi M, Wu XL, Marder SR, Perry JW (1999) Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature 398:51– 54

3. Denk W, Strickler JH, Webb WW (1990) Two-photon laser scanning fluorescence microscopy. Science 248:73–76

4. Deubel M, Von Freymann G, Wegener M, Pereira S, Busch K, Soukoulis CM (2004) Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nat Mater 3:444–447

5. Rensch C, Hell S, Schickfus MV, Hunklinger S (1989) Laser scanner for direct writing lithography. Appl Opt 28:3754–3758

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