Author:
Guan Yanwei,Gao Shiqiao,Liu Haipeng,Niu Shaohua
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Alper SE, Akin T (2004) Symmetrical and decoupled nickel microgyroscope on insulating substrate. Sens Actuator A Phys 115(2):336–350
2. Azgin k, Temiz Y, Akin T (2007) An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism. In: Proceedings IEEE MEMS’07, Kobe, 2007, pp 607–610
3. Chen JC, Wada BK (1977) Matrix perturbation for structural dynamic analysis. AIAA J 15(8):1095–1100
4. Chen SH, Liu YL, Huang DP (1984) Matrix perturbation of vibration modal analysis. In: Proceedings international modal analysis conference, Orlando, 1984, pp 698–704
5. Cho J, Gregory J, Naiafi K (2012) High-Q, 3kHz single-crystal silicon cylindrical rate-integrating gyro (CING). In: Proceedings MEMS, Paris, pp 172–175
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