A New Coupling Spring Design for MEMS Tuning Fork Structures Demonstrating Robustness to Fabrication Errors and Linear Accelerations
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Published:2021-12-31
Issue:6
Volume:21
Page:418-426
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ISSN:1598-1657
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Container-title:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
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language:en
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Short-container-title:JSTS
Author:
Iqbal Faisal,Din Hussamud,Han Seungoh,Lee Byeungleul
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials