1. Balaraman D, Bhattacharya SK, Ayazi F, Papapolymerou J (2002) Low-cost low actuation voltage copper RF-MEMS switches. IEEE Microw Theory Tech Symp 2:1225–1228
2. Cho II-J, Song T, Baek S-H, Yoon E (2005) Low voltage and low power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces. IEEE Trans Microw Theory Tech 53:2450–2457
3. Fedder GK (1994) Simulation of microelectromechanical systems. Phd dissertation, Electrical Engineering and Computer Science, University of California
4. Goldsmith C, Lin T-H, Powers B, Wu W-R, Norvell B (1995) Micromechanical membrane switches for microwave applications. IEEE Microw Theory Tech Symp 1:91–94
5. Hah D, Yoon E, Hong S (2000) A low voltage actuated micromachined microwave switch using torsion springs and leverage. IEEE Trans Microw Theory Tech 1:2540–2545