Author:
Sawa Yoshitaka,Yamashita Kenji,Kitadani Takeshi,Noda Daiji,Hattori Tadashi
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Becker EW, Ehrfeld W, Hagmann P, Maner A, Munchmeyer D (1986) Microelectron Eng 4:35–56
2. Hattori T (2006) IEEJ Trans Sens Micromach 126:211–215
3. Kimura T, Fukinbara H, Hattori T (2006a) IEEJ Trans Sens Micromach 126:195–199
4. Kimura T, Yamashita K, Kitadani T, Kimura T, Idei K, Hattori T (2006b). In: Proceedings of the 2006 IEEE international symposium on micro-nano mechatronics and human science, Nagoya, Japan, November 5–8, pp 486–490
5. Sawa Y, Tanaka T, Kitadani T, Ueno H, Itoigawa K, Yamashita K, Noda D, Hattori T (2008a) Microsyst Technol 14:1559–1565
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