Experimental validation of compact damping models of perforated MEMS devices

Author:

Veijola Timo,De Pasquale Giorgio,Somà Aurelio

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Bao M, Yang H, Sun Y, French PJ (2003) Modified Reynolds’ equation and analytical analysis of perforated structures. J Micromech Microeng 13:795–800. doi: 10.1088/0960-1317/13/6/301

2. De Pasquale G, Veijola T (2008) Comparative numerical study of FEM methods solving gas damping in perforated MEMS structures. Microfluidics Nanofluidics 5:517–528. doi: 10.1007/s10404-008-0264-x

3. Feng C, Zhao P, Liu DQ (2007) Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration. Microsyst Technol 13:623–633

4. Kim ES, Cho YH, Kim MU (1999) Effect of holes and edges on the squeeze film damping of perforated micromechanical structures. In: Proceedings of IEEE micro electro mechanical systems conference, pp 296–301

5. Kwok PY, Weinberger MS, Breuer KS (2005) Fluid effects in vibrating micromachined structures. J Microelectromech Syst 14:770–781. doi: 10.1109/JMEMS.2005.845425

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