Author:
Miyakawa Natsuki,Legner Wolfgang,Ziemann Thomas,Telitschkin Dimitri,Fecht Hans-Jörg,Friedberger Alois
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Aplin KL, Tarakanov VP (2003) Modelling studies of charged particle interactions for a space application. In: Electrostatics Conference of the Institute of Physics, Edinburgh
2. Barron AR (1996) CVD of SiO2 and related materials: an overview. Adv Mater Opt Electron 6:101–114
3. Chiarini M, Cerabolini P, Pennestri G, Bentini GG, Cocomazzi R, Cerutti A, Nubile A (2006) Monolithic silicon-based microthruster for orbital and attitude control fabricated by using MEMS technologies. In: CANEUS
4. Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus. J Microelectromech Syst 7(1):128–135
5. Gadkari PR, Warren AP, Todi RM, Petrova RV, Coffey KR (2005) Comparison of the agglomeration behavior of thin metallic films on SiO2. J Vac Sci Technol A 23(4):1152–1161
Cited by
21 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献