Author:
Ali Washim Reza,Prasad Mahanth
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Birkett C, Shalis E, Vlahopoulos N, Wu Z (1997) Numerical load generation, vibration analysis, and acoustic signature prediction of a ground vehicle. In: Proceeding of National Conference on Noise Control Engineering, pp 123–128
2. Blackstock DT (2000) Fundamentals of physical acoustics. Wiley. ch. 4, p 14
3. Bouwstra S, Storgaard-Larsen T, Scheeper P, Gullov JO, Bay J, Mullenborg M, Rombach P (1998) Silicon microphones-a Danish perspective. J Micromech Microeng 8:64–68
4. Chang CC, Chang JH (1996) A study on fabrication of zinc oxide thin film acoustic sensors. J Mar Sci Technol 4(1):49–53
5. Chen PH, Peng HY, Hsieh CM, Chyu MK (2001) The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO2 layer. J Sens Actuators A 93:132–137
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献