Fabrication of micro pore optics with smooth sidewall using X-ray lithography

Author:

Zhang Tianchong,Yi Futing,Wang Bo,Liu Jing,Ashmkhan Marina,Zhang Xinshuai

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Collon MJ, Beijersbergen MW, Wallace K, Bavdaz M, Fairbend R, Seguy J, Schyns E, Krumrey M, Freyberg M (2007) X-ray imaging glass micro-pore optics, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III. In: O’Dell SL, Pareschi G (eds) Proceedings of SPIE, vol. 6688, pp 668812_1-13

2. Ezoe Y, Mitsuishi I, Takagi U, Koshiishi M, Mitsuda K, Yamasaki NY, Ohashi T, Kato F, Sugiyama S, Riveros RE, Yamaguchi H, Fujihira S, Kanamori Y, Morishita K, Nakajima K, Maeda R (2010) Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes. Microsyst Technol 16:1633–1641

3. Owens A, Bavdaz M, Beijersbergen M, Brunton AN, Fraser GW, Martin D, Nieminen P, Peacock A, Pia MG (2001) HERMES: an imaging X-ray fluorescence spectrometer for the BepiColombo mission to Mercury, soft X-ray and EUV imaging systems II. In: Tichenor DA, Folta JA (eds) Proceedings of SPIE, vol. 4506, pp 136–145

4. Peele AG (1999) Investigation of etched silicon wafers for lobster-eye optics. Rev Sci Instrum 70:1268–1273

5. Peele AG, Nugent KA, Rode AV, Gabel K, Richardson MC, Strack R, Siegmund W (1996) X-ray focusing using lobster-eye optics: a comparison of theory with experiment. Appl Opt 35:4420–4425

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