Design optimization for an SOI MOEMS accelerometer-Reference-Cited by-同舟云学术

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Design optimization for an SOI MOEMS accelerometer

Published:2017-03-20 Issue:1 Volume:24 Page:465-472
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Teo Adrian J. T.^ORCID,Li Holden King-Ho,Tan Say Hwa,Yoon Yong-Jin

Funder

Nanyang Technological University (SG)

Temasek Lab@NTU TDP

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/article/10.1007/s00542-017-3370-4/fulltext.html

Reference23 articles.

1. Bhansali S, Vasudev A (2012) MEMS for biomedical applications. Elsevier, Amsterdam

2. Bochobza-Degani O, Yechieli R, Bar-Lev S, Yehuda UB, Nemirovsky Y (2003) Characterization of a novel micromachined accelerometer with enhanced-MIDOS. In: TRANSDUCERS, solid-state sensors, actuators and microsystems, 12th international conference on, 2003. IEEE, pp 1395–1398

3. Borinski JW, Boyd CD, Dietz JA, Duke JC, Home MR (2001) Fiber optic sensors for predictive health monitoring. In: AUTOTESTCON Proceedings, 2001. IEEE systems readiness technology conference, 2001. pp 250–262. doi: 10.1109/autest.2001.948969

4. Bose S, Keller SS, Alstrøm TS, Boisen A, Almdal K (2013) Process optimization of ultrasonic spray coating of polymer films. Langmuir 29:6911–6919

5. Choi W, Jeon Y, Jeong J-H, Sood R, Kim S-G (2006) Energy harvesting MEMS device based on thin film piezoelectric cantilevers. J Electroceramics 17:543–548

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