Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears-Reference-Cited by-同舟云学术

Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

Published:2008-03-26 Issue:9-11 Volume:14 Page:1675-1681
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Loechel Bernd,Goettert Jost,Gruetzner Gabi,Bednarzik Martin,Waberski Christoph,Ahrens Gisela,Engelke Rainer,Singh Varshni,Degen Reinhard,Kirsch Udo

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-008-0607-2.pdf

Reference3 articles.

1. Goettert J, Ahrens G, Bednarzik M, Degen R, Desta Y, Gruetzner G, Jian L, Loechel B, Ruhmann R, Yoonyoung J (2002) Cost Effective Fabrication of High Precision Microstructures Using a Direct-LIGA Approach. In: Proceedings of COMS 2002, Ypsilanti, Michigan, September

2. Kouba J, Bednarzik M, Engelke R, Ahrens G, Miller H, Haase D (2006) Optimizing SU-8 Resist to Fabricate Micro-Metallic Structures. Solid State Technol. April 39–44

3. Loechel B, Goettert J, Desta YM (2007) Direct LIGA service for prototyping: status report. Microsyst Technol 13:327–334

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