Funder
World-Class 300 Project from the Small and Medium Business Administration of Korea
National Research Foundation of Korea
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Akcalt E, Kazunori N (2001) Reha U (2001) Cycle-time improvements for photolithography process in semiconductor manufacturing. IEEE Trans Semiconduct Manuf 14(1):48–56
2. AS5040 10-bit contactless absolute rotary position sensor with digital angle (2018) https://ams.com/as5040 Accessed 15 May 2018
3. Brown HB et al (2007) Design and control of a second-generation hyper-redundant mechanism. 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems. IEEE, 2007
4. Cazacu D (2011) Stanescu C (2011) Performance analysis of a solenoidal electromagnet. Sci Bull Electr Eng Facult 2(16):5–10
5. Chang CH, Chen C (2020) Method and apparatus to treat semiconductor substrate. U.S. Patent Application No 16/542,036, 2020