Author:
Ganji Bahram Azizollah,Nateri Mojtaba Shams
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Chowdhury S, Jullien GA, Ahmadi MA, Miller WC, (2001) A MEMS implementation of an acoustical sensor array. In: IEEE international symposium, pp 273–276
2. Chowdhury S, Ahmadi M, Miller WC (2002) Design of a MEMS acoustical beamforming sensor microarray. IEEE Sens J 2(6):617–627
3. Damghanian M, Majlis BY, (2006) Design of a high sensitivity structure for mems fingerprint sensor, 2006 IEEE international conference on semiconductor electronics (ICSE 2006), pp 177–184
4. Damghanian M, Majlis BY (2008) A modified lift-off technique to prevent pattern following effect in microfabrication, 2008 IEEE international conference on semiconductor electronics (ICSE 2008), pp 634–638
5. De Souza RJ, Wise KD (1997) A very high density bulk micromachined capacitive tactile imager. Solid state sensors and actuators. Transducers’97 2:1473–1476
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献