CMUT cavity pressure measurement using an atomic force microscope
Author:
Funder
Natural Sciences and Engineering Research Council of Canada
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00542-024-05618-x.pdf
Reference37 articles.
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3. Bakhtazad A, Manwar R, Chowdhury S (2015) Fabrication and characterization of sealed cavities realized by adhesive wafer bonding with dry etched cyclotene. Microsyst Technol 21(11):1–8. https://doi.org/10.1007/s00542-015-2416-8
4. Brenner K, Ergun A, Firouzi K, Rasmussen M, Stedman Q, Khuri-Yakub B (2019) Advances in capacitive micromachined ultrasonic transducers. Micromachines 2:1–27. https://doi.org/10.3390/mi10020152
5. Chowdhury S (2021) A simple closed-form model to accurately calculate the electromechanical coupling coefficient of CMUTs. Tm - Technisches Messen 88(11):714–723. https://doi.org/10.1515/teme-2021-0080
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