Author:
Pankratov E. L.,Bulaeva E. A.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Cell Biology,Physical and Theoretical Chemistry,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics,Biotechnology
Reference24 articles.
1. Ahlgren T, Likonen J, Slotte J, Räisänen J, Rajatore M, Keinonen J (1997) Concentration dependent and independentSi diffusion in ion-implanted GaAs. Phys Rev B 56(8):4597
2. Bykov YuV, Yeremeev AG, Zharova NA, Plotnikov IV, Rybakov KI, Drozdov MN, Drozdov YuN, Skupov VD (2003) Diffusion processes in semiconductor structures during microwave annealing. Radiophys Quantum Electron 43(3):836
3. Cheremskoy PG, Slesov VV, Betekhtin VI (1990) Pore in solid bodies. Energoatomizdat, Moscow (in Russian)
4. Fahey PM, Griffin PB, Plummer JD (1989) Point defects and dopant diffusion in silicon. Rev Mod Phys 61:289
5. Gotra ZY (1991) Technology of microelectronic devices. Radio and communication, Moscow