Fluorination of silylated nanosilicas using c-C4F8 radiofrequency plasma

Author:

Kuzema P. O.,Bolbukh Yu. M.,Tertykh V. A.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Cell Biology,Physical and Theoretical Chemistry,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics,Biotechnology

Reference32 articles.

1. Bolbukh YuM (2004) Silicon hydride groups of silica surface in the reactions of hydrosilylation and polymerization of olefins. Dissertation, Institute of Surface Chemistry of NAS of Ukraine

2. Bouchoucha M, van Heeswijk RB, Gossuin Y, Kleitz F, Fortin M-A (2017) Fluorinated mesoporous silica nanoparticles for binuclear probes in 1H and 19F magnetic resonance imaging. Langmuir 33:10531–10542. https://doi.org/10.1021/acs.langmuir.7b01792

3. Carter JV, Barwick VJ (eds) (2011) Good practice guide for isotope ratio mass spectrometry, 1st edn. FIRMS

4. Chambers JJ, Busch BW, Schulte WH, Gustafsson T, Garfunkel E, Wang S, Maher DM, Klein TM, Parsons GN (2001) Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon. Appl Surf Sci 181:78–93. https://doi.org/10.1016/S0169-4332(01)00373-7

5. Cuddy MF (2012) Contributions of gas-phase plasma chemistry to surface modifications and gas-surface interactions: investigations of fluorocarbon rf-plasmas. Dissertation, Colorado State University

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