Quantitative distribution analysis of B, As and Sb in the layer system SiO2/Si with SIMS: elimination of matrix and charging effects
Author:
Publisher
Springer Science and Business Media LLC
Subject
Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/BF00469821.pdf
Reference24 articles.
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5. Morgan AE, Werner HW (1976) Appl Phys 11:193
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