1. W. S. Ruska,Microelectronic Processing: An Introduction to the Manufacture of Integrated Circuits, McGraw-Hill, New York, 1987, pp 68–76.
2. A. Endo, M. Takada, K. Adachi, H. Takasago, T. Yada, and Y. Onishl,J. Electrochem. Soc.: Solid-State Sci. Tech.,34, 2522 (1987).
3. K. L. Mittal,Polyimides: synthesis, characterization, and applications, Plenum Press, New York, 1984.
4. C. Feger, M. M. Khojasteh, and M. S. Htoo,Advances in polyimide science and technology, Technomic Publications, Lancaster, 1993.
5. C. E. Sroog,J. Polym. Sci.: Macromol. Rev.,11, 161 (1979).