Coupled chaotic vibration considering resonator mass change of micro-resonant gas sensor
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00419-020-01734-y.pdf
Reference30 articles.
1. Bahrampour, A.R., Vahedi, M., Abdi, M., et al.: Lagrangian approach for analysis of radiation pressure induced parametric instability in micro-resonators. Phys. Lett. A 372(41), 6298–6300 (2008)
2. Rafael, N.G., Anna, M.B., Alfons, D.: AC transfer function of electrostatic capacitive sensors based on 1-D equivalent model: application to silicon microphones. J. Microelectromech. Syst. 12(6), 972–978 (2003)
3. Kumar, D.D., Kumar, N., Kalaiselvam, S., et al.: Micro-tribo-mechanical properties of nanocrystalline TiN thin resonators for small scale device applications. Tribol. Int. 88, 25–30 (2015)
4. Gerhard, M., Sebastian, B., Sumit, P.: Novel chemical sensor applications in commercial aircraft. Procedia Eng. 25, 16–22 (2011)
5. Fu, X.R., Xu, L.Z.: Effects of Casimir force on multi-field coupled nonlinear vibration of orthotropic micro resonator. J. Vibroeng. 19(8), 5702–5718 (2017)
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