Author:
Ansari R.,Faghih Shojaei M.,Ebrahimi F.,Rouhi H.
Publisher
Springer Science and Business Media LLC
Reference36 articles.
1. Tilmans, H.A., Elwespoek, M., Fluitman, J.H.: Micro resonant force gauges. Sens. Actuator A 30, 35–53 (1992)
2. Zook, J.D., Burns, D.W., Guckel, H., Sniegowski, J.J., Engelstad, R.L., Feng, Z.: Characteristics of polysilicon resonant microbeams. Sens. Actuator A 35, 290–294 (1992)
3. Andrews, M.K., Turner, G.C., Harris, P.D., Harris, I.M.: A resonant pressure sensor based on a squeezed film of gas. Sens. Actuator A 36, 219–226 (1993)
4. Gupta, R.K., Senturia, S.D.: Pull-in time dynamics as a measure of absolute pressure. In: Proceedings of the IEEE Tenth Annual International Workshop on Microelectromechanical Systems: MEMS ’97, Nagoya, Japan, pp. 51–59. IEEE, New York (1997)
5. Gui, C., Legtenberg, R., Tilmans, H.A., Fluitman, J.H., Elwenspoek, M.: Nonlinearity and hysteresis of resonant strain gauges. J. Microelectromech. Syst. 7, 122–127 (1998)
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献