Plasma-resistant characteristics according to sintering conditions of CaO–Al2O3–SiO2 glass coating layer
Author:
Funder
small and medium business administration
Publisher
Springer Science and Business Media LLC
Subject
Ceramics and Composites
Link
https://link.springer.com/content/pdf/10.1007/s43207-021-00149-x.pdf
Reference25 articles.
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3. K.-B. Kim, D.-M. Kim, J.-K. Lee, Y.-S. Oh, H.-T. Kim, H.-S. Kim, S.-M. Lee, Erosion behavior of YAG ceramics under fluorine plasma and their XPS analysis. J. Korean Ceram. Soc. 46(5), 456–461 (2009). https://doi.org/10.4191/KCERS.2009.46.5.456
4. D.-M. Kim, M.-R. Jang, Y.-S. Oh, S. Kim, S.-M. Lee, S.-H. Lee, Relative sputtering rates of oxides and fluorides of aluminum and yttrium. Surf. Coat. Technol. 309, 694–697 (2017). https://doi.org/10.1016/j.surfcoat.2016.11.007
5. J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara, K. Uematsu, Plasma-resistant dense yttrium oxide film prepared by aerosol deposition process. J. Amer. Ceram. Soc. 90(8), 2327–2332 (2007). https://doi.org/10.1111/j.1551-2916.2007.01738.x
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