Design of 2-DOF decoupled large stroke precision positioning platform
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://link.springer.com/content/pdf/10.1007/s12206-022-1105-7.pdf
Reference23 articles.
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2. X. Zhao, W. D. Zhu and Y. H. Li, Analytical solutions of nonlocal coupled thermoelastic forced vibrations of micro-/nanobeams by means of green’s functions, Journal of Sound and Vibration, 481 (2020).
3. J. Gan, X. Zhang, H. Li and H. Wu, Full closed-loop controls of micro/nano positioning system with nonlinear hysteresis using micro-vision system, Sensors and Actuators A-Physical, 257 (2017) 125.
4. M. Chen, C. Tsai and L. Fu, A novel design and control to improve positioning precision and robustness for a planar maglev system, IEEE Transactions on Industrial Electronics, 66 (2019) 4860.
5. M. Chen, P. Wang and W. Hsiao, Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method, International Journal of Advanced Manufacturing Technology, 104 (2019) 1203.
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