Annealing of lead zirconate titanate (65/35) thin films for ultra large scale integration storage dielectric applications: Phase transformation and electrical characteristics-Reference-Cited by-同舟云学术

Annealing of lead zirconate titanate (65/35) thin films for ultra large scale integration storage dielectric applications: Phase transformation and electrical characteristics

Published:1992-05 Issue:5 Volume:21 Page:503-512
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Chikarmane Vinay,Kim Jiyoung,Sudhama Chandra,Lee Jack,Tasch Al,Novak Steve

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02655617.pdf

Reference23 articles.

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2. R. Moazzami, Ph.D. Dissertation, University of California, 1991.

3. H. Shinriki, M. Nakata, Y. Nishioka and K. Mukai, Tech. Dig. Symp. on VLSI Techn., p. 25 (1989).

4. J. Yugami, T. Mine, S. Iijima, and A. Hiraiwa, Tech. Dig. Solid-State Devices and Mater. Symp. p. 173 (1988).

5. L. H. Parker and A. F. Tasch, Proc. IEEE77, 374 (1989).

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