Structures and physical properties of sputtered amorphous SiC films

Author:

Matsunami Hiroyuki,Masahiro Hagio,Tanaka Tetsuro

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference13 articles.

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3. E.A. Fagen, Silicon Carbide-1973 (University of South Carolina Press, Columbia, 1974) 542.

4. E.A. Fagen, Proc. 5th Intern. Conf. Amorphous and Liquid Semiconductors, Garmisch-Partenkirchen, (1973) 601.

5. M. Gorman and S.A. Solin, Solid State Commun.15, 761 (1974).

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