Plasma deposition of inorganic silicon containing films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Plasma deposition of inorganic silicon containing films

Published:1979-05 Issue:3 Volume:8 Page:345-375
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Reinberg Alan R.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02655633.pdf

Reference17 articles.

1. H.F. Sterling and R.C.G. Swann, Solid State Electronics8, 653 (1965).

2. J. Ogier, Compt. Rend., 89, 1068, (1879).

3. M. Berthelot, Annales de Chimie et de Physique, 5e serie, t.X. p. 76.

4. Plasma Chemistry in Electrical Discharges, F.K. McTaggert, Elsevier Publishing Co. (1967).

5. Transport Phenomena, Bird, Steward and Lightfoot, John Wiley & Son, (1960), p. 114.

Cited by 70 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. COMPOSITION, STRUCTURE, AND FUNCTIONAL PROPERTIES OF THIN SILICON NITRIDE FILMS GROWN BY ATOMIC LAYER DEPOSITION FOR MICROELECTRONIC APPLICATIONS (REVIEW OF 25 YEARS OF RESEARCH);Journal of Structural Chemistry;2022-07

2. Preparation of Nanostructured SixN1−x Thin Films by DC Reactive Magnetron Sputtering for Tribology Applications;Silicon;2017-04-24

3. Vortices evolution in confined laminar radial flow between parallel discs;Chemical Engineering Science;2014-09

4. Study on Flow Field Structure in Axisymmetric Radial Flow;2013 International Conference on Mechanical and Automation Engineering;2013-07

5. Effect of deposition temperature on the chemical properties of thermally deposited silicon nitride films;Optical Materials;2005-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3