1. K. Petersen, Silicon as a mechanical material. Proceed. IEEE, El. Dev., 70(5), 1982, 420–457.
2. J.B. Agnell, S.C. Terry, P.W. Barth, Silicon micromechanical devices. Sc. Am., 44, 1983, 44–54.
3. J. Bryzek, Impact of MEMS technology on society. Sensors and Actuators A, 56, 1996, 1–9.
4. J.C. Greenwood, Silicon in mechanical sensors. J. Phys., 21, 1988, 1114–1128.
5. K. Petersen, Dynamic micromechanics on silicon, techniques and devices. IEEE Tran. El. Dev., ED-25, 1978, 1241–1250.