1. See, for example,Ion Implantation, ed. by. G. Dearnalay, J.H. Freemans, R.S. Nelson and J. Stephen (North-Holland, Amsterdam 1973) andIon Implantation in Semiconductors ed. by J.W. Mayer, L. Eriksson and J.A. Davies (Academic, New York 1970)
2. Ion Implantation and Beam Processing, ed. by J.S. Williams and J.M. Poate (Academic, New York 1984)
3. Laser Annealing of Semiconductors, ed. by J.M. Poate and J.W. Mayer (Academic, New York 1982)
4. Laser-Solid Interactions and Transient Thermal Processing of Materials, ed. by J. Narayan, W.L. Brown, R.A. Lemons (Elsevier, New York 1983)
5. G.A. Kachurin, E.V. Nidaev, A.I. Popov: Sov. Phys. Semicond.16, 13 (1982)