An overview of ion sputtering physics and practical implications-Reference-Cited by-同舟云学术

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An overview of ion sputtering physics and practical implications

Published:1983-05 Issue:5 Volume:18 Page:1267-1290
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Pivin Jean -Claude

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF01111944.pdf

Reference104 articles.

1. NATO Advanced Study Institute Series,1978

2. P. Sigmund, ?Inelastic Ion-Surface Collisions?, edited by N. H. Tolk (Academic Press Inc., New York, 1977) p. 121.

3. J. Lindhard, M. Scharff andM. E. Schiott,Kgl. Danska Videnskab. Selskab. Mat. Phys. Medd. 33 (1963).

4. J. Lindhard, V. Nielsen andM. Scharff,ibid. 36 (1968).

5. J. B. Sanders, Thesis, University of Leiden (1968).

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