Amorphous hydrogenated carbon films on semiconductors-Reference-Cited by-同舟云学术

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Amorphous hydrogenated carbon films on semiconductors

Published:1989-06 Issue:6 Volume:48 Page:549-558
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Ugolini D.,Eitle J.,Oelhafen P.,Wittmer M.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00617856.pdf

Reference27 articles.

1. A.M. Lettington: InAmorphous Hydrogenated Carbon Films, ed. by P. Koidl, P. Oelhafen (Les editions de Physique, Les Ulis, France 1987) p. 359

2. H.-C. Tsai, D.B. Bogy: J. Vac. Sci. Technol. A5, 3287 (1987)

3. C. Weissmantel: In [ref. 1], p. 49

4. C. Wild, P. Koidl, J. Wagner: In [ref. 1], p. 137

5. N. Savvides: In [ref. 1] p, 275

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