Effect of nitrogen content on mechanical properties and tribological behaviors of hydrogenated amorphous carbon films prepared by ion beam assisted chemical vapor deposition-Reference-Cited by-同舟云学术

Effect of nitrogen content on mechanical properties and tribological behaviors of hydrogenated amorphous carbon films prepared by ion beam assisted chemical vapor deposition

Published:2004-11 Issue:1-2 Volume:466 Page:137-150
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lin Jen Fin,Wan Zer Chuan,Wei Pal Jen,Chu Hsiao Yeh,Ai Chi Fong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference58 articles.

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3. Properties of diamond-like carbon

4. Superhard diamondlike carbon: preparation, theory, and properties

5. Thin‐film deposition by a new laser ablation and plasma hybrid technique

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