Fabrication of ITO diffraction grating structure for infrared plasmonics by thermal nanoimprint lithography
Author:
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
https://link.springer.com/content/pdf/10.1007/s10043-022-00759-8.pdf
Reference17 articles.
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3. Kim, K., Yoon, Gwanho., Back, S., Rho, J., Lee, H.: Facile nanocasting of dielectric metasurfaces with sub-100 nm resolution. ACS Appl. Mater. Interfaces 11, 26109 (2019)
4. Takeda, M., Takahara, R., Hasuike, N.: Plasmonic color pixels fabricated by nanoimprint process. Opt. Rev. 27, 427 (2020)
5. Matsui, H., Hasebe, T., Hasuike, N., Tabata, H.: Plasmonic heat shielding in the infrared range using oxide semiconductor nanoparticles based on Sn-doped In$$_{2}$$O$$_{3}$$: effect of size and interparticle gap. ACS Appl. Nano Mater. 1, 1863 (2018)
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