A Comparative Study on the Microstructure and Properties of ITO Targets and Thin Films Prepared from Two Different Powders-Reference-Cited by-同舟云学术

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A Comparative Study on the Microstructure and Properties of ITO Targets and Thin Films Prepared from Two Different Powders

Published:2020-09-11 Issue:5 Volume:34 Page:675-693
ISSN:1006-7191
Container-title:Acta Metallurgica Sinica (English Letters)
language:en
Short-container-title:Acta Metall. Sin. (Engl. Lett.)

Author:

Mei Fangsheng,Yuan Tiechui,Li Ruidi,Huang Jingwei

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Metals and Alloys

Link

https://link.springer.com/content/pdf/10.1007/s40195-020-01129-6.pdf

Reference48 articles.

1. F. Mei, T. Yuan, R. Li, K. Qin, L. Zhou, W. Wang, J. Eur. Ceram. Soc. 38, 521 (2018)

2. Y. Yang, Q. Huang, A.W. Metz, J. Ni, Adv. Mater. 16, 321 (2004)

3. M.H. Ahn, E. Cho, S.J. Kwon, Appl. Surf. Sci. 258, 1242 (2011)

4. S. Besbes, H.B. Ouada, J. Davenas, L. Ponsonnet, N. Jaffrezic, P. Alcouffe, Mater. Sci. Eng. C 26, 505 (2006)

5. L.K. Wang, J.J. Chen, J.Y. Yu, H.L. Zhao, J.K. Yang, Vacuum 169, 108879 (2019)

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4. Effects of the phase composition and grain size of Cr particles in Al–Cr targets on the microstructure and properties of AlCrN coatings;Ceramics International;2022-12

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