1. I. Ohlidal and K. Navratil, Thin Sol. Films,67, 245?251 (1980).
2. I. Ohlidal and K. Navratil, Thin Sol. Films,71, 91?102 (1980).
3. M. Born and E. Wolf, Fundamentals of Optics, Pergamon (1970).
4. E. I. Shnarevich, O. A. Rybinskii, and V. A. Zlobin, Dielectrics of Integral Circuits [in Russian], Énergiya, Moscow (1975).
5. A. V. Rzhanov (ed.), Silicon Nitride in Electronics [in Russian], Nauka, Novosibirsk (1982).