Author:
Chen Zhi,Fu Xing,Geng Na,Hu Xiaotang
Publisher
Springer Science and Business Media LLC
Reference12 articles.
1. Jia Wei, Wang Qingyue, Fu Xing et al. Progress of femtosecond laser micromachining [J]. Chinese Journal of Quantum Electronics, 2004, 21(2): 194–201(in Chinese).
2. Riedel D, Hernandez-Pozos J L, Palmer R E et al. Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 [J]. Appl Phys A, 2004, 78(3): 381–385.
3. Barsch N, Korber K, Ostendorf A et al. Ablation and cutting of planar silicon devices using femtosecond laser pulses [J]. Appl Phys A, 2003, 77(2): 237–242.
4. Simon P, Ihlemann J. Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses [J]. Applied Surface Science, 1997, 109/110: 25–29.
5. Ni Xiaochang, Wang Qingyue. Research progress of femtosecond laser ablation [J]. Laser and Optoelectronics Progress, 2002, 39(12): 4–9(in Chinese).
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献