Molecular dynamics of nanometric processing of ion implanted monocrystalline silicon surfaces
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s12209-014-2336-1.pdf
Reference15 articles.
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3. Fang F Z, Venkatesh V C. Diamond cutting of silicon with nanometric finish[J]. CIRP Annals-Manufacturing Technology, 1998, 47(1): 45–49.
4. Nakasuji T, Kodera S, Hara S et al. Diamond turning of brittle materials for optical components[J]. CIRP Annals-Manufacturing Technology, 1990, 39(1): 89–92.
5. Yoshino M. Finite element simulation of plane strain plastic-elastic indentation on single-crystal silicon[J]. International Journal of Mechanical Sciences, 2001, 43(2): 313–333.
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Towards a better understanding of the surface smoothing effect in gas cluster ion beam processing with molecular dynamics simulation and experiment;Optics Express;2024-08-19
2. Molecular dynamics simulation of ultra-precision machining 3C-SiC assisted by ion implantation;Journal of Manufacturing Processes;2021-09
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