Ultrashort Pulse Laser Micromachining of Silicon: Effect of Repetition Rate and Assessment of Surface Integrity of Microchannels
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-023-02325-6.pdf
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1. Predicting Density-Related Mechanical Properties of Amorphous Silicon Nitride Using Molecular Dynamics Simulations;2023
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