Growth and Characterization of Undoped Polysilicon Thick Layers: Revisiting an Old System
Author:
Funder
Electronic Components and Systems for European Leadership
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/s12633-019-00209-2.pdf
Reference24 articles.
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3. Stewart M, Howell RS, Pires L, Hatalis MK (2001) Polysilicon TFT technology for active matrix OLED displays. IEEE Trans Electron Devices 48:845–851. https://doi.org/10.1109/16.918227
4. Van den Bosch G, Kar GS, Blomme P et al (2011) Highly scaled vertical cylindrical SONOS cell with bilayer polysilicon channel for 3-D NAND flash memory. IEEE Electron Device Lett 32:1501–1503. https://doi.org/10.1109/LED.2011.2164775
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