Author:
Li B.,Twesten I.,Schwentner N.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference55 articles.
1. M. Hirose: Photon, Beam and Plasma Assisted Processing, ed. by I.W. Boyd, E.F. Krimmel (Elsevier, New York 1989) p. xvii
2. T. Nozaki, A. Higashisaka: Very High Speed Integrated Circuits: Gallium Arsenide LSI, ed. by T. Ikoma, Semicond. Semimet. 29, 97 (1990)
3. M.W. Geis, N.N. Efremow, S.W. Pang, A.C. Anderson: J. Vac. Sci. Technol. B 5, 363 (1987)
4. VLSI Electron. Microstructure Sci.;N.G. Einspruch,1984
5. Y. Horiike, H. Okano, M. Shibagaki: Conference on Microcircuits Engineering, Grenoble (1982)
Cited by
29 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献