1. AIST Internal Report, Survey Report—Survey on Wafer Surface Temperature Distribution Measurement (2007) [in Japanese]
2. Y. Yamada, J. Ishii, A. Nakaoka, Y. Mizojiri, Int. J. Thermophys. doi: 10.1007/s10765-011-1016-9
3. B.E. Adams, C.W. Shiettinger, K.G. Kreider, in Radiometric Temperature Measurements. II. Applications, ed. by Z. Zhang, B. Tsai, G. Machin (Elsevier, Amsterdam, 2009)
4. T. Iuchi, Y. Yamada, M. Sugiura, A. Torao, in Radiometric Temperature Measurements. II. Applications, ed. by Z. Zhang, B. Tsai, G. Machin (Elsevier, Amsterdam, 2009)
5. T. Makino, T. Kosaka, J. Arima, S. Aoyama, Y. Tujimura, J. Soc. Instrum. Control Eng. 24, 331 (1988) [in Japanese]