A Force Domain Analog-to-Digital Converter Applied to Microscale Tensile Test
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Link
http://link.springer.com/content/pdf/10.1007/s11340-012-9693-2.pdf
Reference35 articles.
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4. Kiesewetter L, Zhang JM, Houdeau D, Steckenborn A (1992) Determination of Young moduli of micromechanical thin-films using the resonance method. Sensors Actuators A Phys 35(2):153–159
5. Osterberg PM, Senturia SD (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J Microelectromech Syst 6(2):107–118
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