Squeeze Film Force Modeling with Considering Slip and Inertia Effects Between Hydrophobic Surfaces Within Submillimeter Clearance-Reference-Cited by-同舟云学术

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Squeeze Film Force Modeling with Considering Slip and Inertia Effects Between Hydrophobic Surfaces Within Submillimeter Clearance

Published:2020-07-16 Issue:3 Volume:68 Page:
ISSN:1023-8883
Container-title:Tribology Letters
language:en
Short-container-title:Tribol Lett

Author:

Li Xueping,Han Bin,Chen Xuedong,Luo Xinhao,Jiang Wei^ORCID

Funder

National Natural Science Foundation of China

National Major Science and Technology Projects of China

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Link

https://link.springer.com/content/pdf/10.1007/s11249-020-01320-x.pdf

Reference22 articles.

1. Fu, X., Huang, Y., Hu, L., Xie, H.B., Chen, W.Y.: Flow behavior control in immersion lithography. Flow Meas. Instrum. 53, 190–203 (2017)

2. Chen, H., Chen, W.Y., Zou, J., Fu, X.: Lens distortion for liquid renovation in immersion lithography. Microelectron. Eng. 88, 2200–2204 (2011)

3. Burugupally, S.P., Perera, W.R.: Dynamics of a parallel-plate electrostatic actuator in viscous dielectric media. Sens. Actuator A Phys. 295, 366–373 (2019)

4. Gnanappa, A.K., Gogolides, E., Evangelista, F., Riepen, M.: Contact line dynamics of a superhydrophobic surface: application for immersion lithography. Microfluid. Nanofluid. 10, 1351–1357 (2011)

5. Kuzma, D.C.J.A.S.R.: Fluid inertia effects in squeeze films. Appl. Sci. Res. 18, 15–20 (1968)

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1. Theoretical investigation of the levitation force generated by underwater squeeze action;Japanese Journal of Applied Physics;2023-03-01

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