Author:
Gnanappa Arun Kumar,Gogolides Evangelos,Evangelista Fabrizio,Riepen Michel
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Bayiati P, Tserepi A, Gogolides E, Misiakos KJ (2004) Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics. J Vac Sci Technol A 11:1546–1551
2. Brandl S, Watso R, Holmes S, Wei Y, Petrillo K, Cummings K, Goodwin F (2006) Investigation of immersion related defects using pre- and post-wet experiments. Proc SPIE 6154:302–310
3. Burnett H, Shedd T, Nellis G, El-Morsi M, Engelstad R, Garoff S, Varanasi K (2005a) Control of the receding meniscus in Immersion Lithography. J Vac Sci Technol B 23:2611–2616
4. Burnett H, Shedd T, Nellis G, Van Peski CJ (2005b) Static and dynamic contact angles of water on photoresist. J Vac Sci Technol B 23:2721–2727
5. Burnett HB, Wei AC, Morsi MS, Shedd TA, Nellis GFJ, Van Peski C, Grenville A (2006) Modeling and experimental investigation of bubble entrapment for flow over topography during immersion lithography. J Microlith Microfab Microsyst 5(1):013008-1–013008-8
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