Author:
Ming Li,Chaudhri M. Munawar
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference35 articles.
1. Angell, J.B., Terry, S.C., Barth, P.W.: Silicon micromechanical devices. Sci. Am. 248, 44–55 (1983)
2. Kim, H.-J., Kim, D.-E.: Nanoscale friction: a review. Int J. Precis. Eng. Manuf. 10, 141–151 (2009)
3. Subhash, G., Corwin, A.D., de Boer, M.P.: Evolution of wear characteristics and frictional behaviour of MEMS devices. Tribol. Lett. 41, 177–189 (2011)
4. Bhushan, B., Kulkarni, A.V.: Effect of normal load on microscale friction measurements. Thin Solid Films 278, 49–56 (1996)
5. Bhushan, B., Koinkar, V.N.: Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices. Sens. Actuators A Phys. 57, 91–102 (1996)
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