Air Vortices and Nano-Vibration of Aerostatic Bearings-Reference-Cited by-同舟云学术

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Air Vortices and Nano-Vibration of Aerostatic Bearings

Published:2011-02-13 Issue:2 Volume:42 Page:179-183
ISSN:1023-8883
Container-title:Tribology Letters
language:en
Short-container-title:Tribol Lett

Author:

Chen Xuedong,Chen Han,Luo Xin,Ye Yixi,Hu Yuantai,Xu Jiaqiang

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/s11249-011-9761-2.pdf

Reference10 articles.

1. Shinnno, H., Hashizume, H., Yoshioka, H., Komatsu, K., Shinshi, T., Sato, K.: X-Y-θ nano-positioning table system for a motor machine. Annal. CIRP. 53(1), 337–340 (2004)

2. Shinnno, H., Yoshioka, H., Taniguchi, K.: A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining. Annal. CIRP. 56(1), 369–372 (2007)

3. Kassab, S.Z., Noureldeen, E.M., Shawky, M.A.: Effects of operating conditions and supply hole diameter on the performance of a rectangular aerostatic bearing. Tribol. Int. 30(7), 533–545 (1997)

4. Chen, X., He, X.: The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography. Tribol. Int. 39(11), 1336–1341 (2006)

5. Kassab, S.Z.: Empirical correlations for the pressure depression in externally pressurized gas bearings. Tribol. Int. 30(1), 59–67 (1997)

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