Author:
Shojaee S. A.,Qi Y.,Wang Y. Q.,Mehner A.,Lucca D. A.
Funder
National Science Foundation
Deutsche Forschungsgemeinschaft
Center for Integrated Nanotechnologies US Department of Energy
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
4 articles.
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1. Heat treatment of ion-irradiated silica-based thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-05
2. Effects of ion irradiation on chemical and mechanical properties of magnetron sputtered amorphous SiOC;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-05
3. Influence of He-ion irradiation of ceramic AlN;Vacuum;2019-05
4. Effects of nuclear and electronic stopping powers on the conversion of hybrid silicate thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-04